The use of thin films made of alloys, i.e., containing multiple metal species, can enhance their properties. However, as with single-element films, residual stress in the films can limit their performance. A model is proposed for relating the stress in alloy thin films to the processing conditions (growth rate, temperature, and sputter-gas pressure), material properties (composition, atomic and defect mobilities, and elastic moduli), and microstructure (grain size and grain growth kinetics). The model is based on stress-generating processes that occur during film growth at grain boundaries and due to energetic particle impacts. While the equations are similar to those proposed for single-element films, the alloy kinetic parameters now contain the effects of the different atomic species. The model is used to explain the growth rate and composition dependence of in situ stress evolution during the deposition for various concentrations in the tungsten–vanadium system.
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Phase-field modeling of nanostructural evolution in physical vapor deposited phase-separating ternary alloy films
Abstract Self-assembly by spinodal decomposition is known to be a viable route for synthesizing nanoscaled interfaces in a variety of materials, including metamaterials. In order to tune the response of these specialized materials to external stimuli, knowledge of processing-nanostructure correlations is required. Such an understanding is more challenging to obtain purely by experimental means due to complexity of multicomponent atomic diffusion mechanisms that govern the nanostructural self-assembly. In this work, we introduce a phase-field modeling approach which is capable of simulating the nanostructural evolution in ternary alloy films that are typically synthesized using physical vapor deposition. Based on an extensive parametric study, we analyze the role of the deposition rate and alloy composition on the nanostructural self-assembly in ternary alloy films. The simulated nanostructures are categorized on the basis of nanostructured morphology and mapped over a compositional space to correlate the processing conditions with the film nanostructures. The morphology maps reveal that while deposition rate governs the nanostructural evolution at around equi-molar compositions, the impact of composition on nanostructuring is more pronounced when the atomic ratios of alloying elements are skewed.
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- PAR ID:
- 10383507
- Date Published:
- Journal Name:
- Modelling and Simulation in Materials Science and Engineering
- Volume:
- 30
- Issue:
- 8
- ISSN:
- 0965-0393
- Page Range / eLocation ID:
- 084004
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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