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Title: Modeling atomic layer deposition of alumina using reactive force field molecular dynamics
Award ID(s):
1809284
PAR ID:
10388487
Author(s) / Creator(s):
;
Date Published:
Journal Name:
MRS Advances
Volume:
7
Issue:
9
ISSN:
2059-8521
Page Range / eLocation ID:
185 to 189
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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