Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators
- Award ID(s):
- 1752844
- NSF-PAR ID:
- 10390530
- Publisher / Repository:
- American Institute of Physics
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 119
- Issue:
- 13
- ISSN:
- 0003-6951
- Page Range / eLocation ID:
- Article No. 132601
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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