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Title: Development of the ReaxFF Reactive Force Field for Cu/Si Systems with Application to Copper Cluster Formation during Cu Diffusion Inside Silicon
Award ID(s):
1805022
PAR ID:
10392169
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
The Journal of Physical Chemistry C
Volume:
125
Issue:
35
ISSN:
1932-7447
Page Range / eLocation ID:
19455 to 19466
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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