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Title: A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures
PAR ID:
10395016
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  
Publisher / Repository:
Institute of Electrical and Electronics Engineers
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
32
Issue:
1
ISSN:
1057-7157
Page Range / eLocation ID:
p. 126-135
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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