High Aspect Ratio Glass Microstructures by Laser Induced Etching.
- Award ID(s):
- 1841473
- NSF-PAR ID:
- 10395376
- Date Published:
- Journal Name:
- IEEE EMBS Micro and Nanotechnology inMedicine Conference
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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