Lii-Rosales, Ann, Johnson, Virginia L., Cavanagh, Andrew S., Fischer, Andreas, Lill, Thorsten, Sharma, Sandeep, and George, Steven M. Effectiveness of Different Ligands on Silane Precursors for Ligand Exchange to Etch Metal Fluorides. Retrieved from https://par.nsf.gov/biblio/10397138. Chemistry of Materials 34.19 Web. doi:10.1021/acs.chemmater.2c01603.

Lii-Rosales, Ann, Johnson, Virginia L., Cavanagh, Andrew S., Fischer, Andreas, Lill, Thorsten, Sharma, Sandeep, & George, Steven M. Effectiveness of Different Ligands on Silane Precursors for Ligand Exchange to Etch Metal Fluorides. Chemistry of Materials, 34 (19). Retrieved from https://par.nsf.gov/biblio/10397138. https://doi.org/10.1021/acs.chemmater.2c01603

Lii-Rosales, Ann, Johnson, Virginia L., Cavanagh, Andrew S., Fischer, Andreas, Lill, Thorsten, Sharma, Sandeep, and George, Steven M. "Effectiveness of Different Ligands on Silane Precursors for Ligand Exchange to Etch Metal Fluorides". Chemistry of Materials 34 (19). Country unknown/Code not available. https://doi.org/10.1021/acs.chemmater.2c01603. https://par.nsf.gov/biblio/10397138.

@article{osti_10397138,
place = {Country unknown/Code not available}, title = {Effectiveness of Different Ligands on Silane Precursors for Ligand Exchange to Etch Metal Fluorides}, url = {https://par.nsf.gov/biblio/10397138}, DOI = {10.1021/acs.chemmater.2c01603}, abstractNote = {}, journal = {Chemistry of Materials}, volume = {34}, number = {19}, author = {Lii-Rosales, Ann and Johnson, Virginia L. and Cavanagh, Andrew S. and Fischer, Andreas and Lill, Thorsten and Sharma, Sandeep and George, Steven M.}, }