A 5.3 GHz Al 0.76 Sc 0.24 N Two-Dimensional Resonant Rods Resonator With a k t 2 of 23.9%
- Award ID(s):
- 2034948
- PAR ID:
- 10399081
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 31
- Issue:
- 4
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- 561 to 570
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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