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Title: A 5.3 GHz Al 0.76 Sc 0.24 N Two-Dimensional Resonant Rods Resonator With a k t 2 of 23.9%
Award ID(s):
2034948
PAR ID:
10399081
Author(s) / Creator(s):
; ; ; ; ; ;
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
31
Issue:
4
ISSN:
1057-7157
Page Range / eLocation ID:
561 to 570
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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