Extending the Linearity of AlScN Contour-Mode-Resonators through Acoustic Metamaterials-based Reflectors
- Award ID(s):
- 2034948
- PAR ID:
- 10399082
- Date Published:
- Journal Name:
- IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- ISSN:
- 0885-3010
- Page Range / eLocation ID:
- 1 to 1
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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