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  • Improving Thermal Linearity and Quality Factor of Al 72 Sc 28 N Contour Mode Resonators Using Acoustic Metamaterials based Lateral Anchors
Title: Improving Thermal Linearity and Quality Factor of Al 72 Sc 28 N Contour Mode Resonators Using Acoustic Metamaterials based Lateral Anchors
Award ID(s):
2034948
PAR ID:
10399083
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
2021 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
Page Range / eLocation ID:
1 to 3
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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