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Title: Role of Fluoride Doping in Low-Temperature Combustion-Synthesized ZrO x Dielectric Films
Award ID(s):
1729779 1919789
PAR ID:
10402364
Author(s) / Creator(s):
; ; ; ; ; ;
Date Published:
Journal Name:
ACS Applied Materials & Interfaces
Volume:
14
Issue:
10
ISSN:
1944-8244
Page Range / eLocation ID:
12340 to 12349
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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