Synthesis of Aminosilane Chemical Vapor Deposition Precursors and Polycarbosilazanes through Manganese-Catalyzed Si–N Dehydrocoupling
- Award ID(s):
- 2154359
- PAR ID:
- 10403200
- Date Published:
- Journal Name:
- ACS Sustainable Chemistry & Engineering
- Volume:
- 10
- Issue:
- 13
- ISSN:
- 2168-0485
- Page Range / eLocation ID:
- 4218 to 4226
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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