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Title: Crystallization Behavior of Zinc-Doped Nb 2 O 5 Thin Films Synthesized by Atomic Layer Deposition
Award ID(s):
2103185
PAR ID:
10403975
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
ACS Applied Electronic Materials
Volume:
4
Issue:
9
ISSN:
2637-6113
Page Range / eLocation ID:
4280 to 4287
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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