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Title: Direct laser writing of micrograting arrays using a spatial light modulator
Award ID(s):
2024118 1919557
PAR ID:
10410529
Author(s) / Creator(s):
; ;
Editor(s):
von Freymann, Georg; Blasco, Eva; Chanda, Debashis
Date Published:
Journal Name:
Proc. SPIE 12433, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI, 1243304 (15 March 2023)
Page Range / eLocation ID:
7
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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