Direct laser writing of micrograting arrays using a spatial light modulator
- NSF-PAR ID:
- 10410529
- Editor(s):
- von Freymann, Georg; Blasco, Eva; Chanda, Debashis
- Date Published:
- Journal Name:
- Proc. SPIE 12433, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI, 1243304 (15 March 2023)
- Page Range / eLocation ID:
- 7
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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