A Non-Volatile Threshold Sensing System Using a Ferroelectric Hf 0.5 Zr 0.5 O 2 Device and a LiNbO 3 Microacoustic Resonator
- Award ID(s):
- 2103351
- PAR ID:
- 10425762
- Date Published:
- Journal Name:
- 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
- Page Range / eLocation ID:
- 161 to 164
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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