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Title: A Non-Volatile Threshold Sensing System Using a Ferroelectric Hf 0.5 Zr 0.5 O 2 Device and a LiNbO 3 Microacoustic Resonator
Award ID(s):
2103351
PAR ID:
10425762
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Page Range / eLocation ID:
161 to 164
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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