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Title: ULTRA-RAPID MICROFABRICATION OF HOLLOW-WELL MICRONEEDLES BY DIFFRACTION ULTRAVIOLET (UV) LITHOGRAPHY
Award ID(s):
2039014
PAR ID:
10431048
Author(s) / Creator(s):
Date Published:
Journal Name:
Hilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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