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Abstract 17 MeV proton irradiation at fluences from 3–7 × 1013cm−2of vertical geometry NiO/β-Ga2O3heterojunction rectifiers produced carrier removal rates in the range 120–150 cm−1in the drift region. The forward current density decreased by up to 2 orders of magnitude for the highest fluence, while the reverse leakage current increased by a factor of ∼20. Low-temperature annealing methods are of interest for mitigating radiation damage in such devices where thermal annealing is not feasible at the temperatures needed to remove defects. While thermal annealing has previously been shown to produce a limited recovery of the damage under these conditions, athermal annealing by minority carrier injection from NiO into the Ga2O3has not previously been attempted. Forward bias annealing produced an increase in forward current and a partial recovery of the proton-induced damage. Since the minority carrier diffusion length is 150–200 nm in proton irradiated Ga2O3, recombination-enhanced annealing of point defects cannot be the mechanism for this recovery, and we suggest that electron wind force annealing occurs.
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Comparison of 10 MeV Neutron Irradiation Effects on NiO/Ga 2 O 3 Heterojunction Rectifiers and Ni/Au/Ga 2 O 3 Schottky Rectifiers
Neutrons generated through charge-exchange9Be (p; ni)9Be reactions, with energies ranging from 0–33 MeV and an average energy of ∼9.8 MeV were used to irradiate conventional Schottky Ga2O3rectifiers and NiO/Ga2O3p-n heterojunction rectifiers to fluences of 1.1–2.2 × 1014cm−2. The breakdown voltage was improved after irradiation for the Schottky rectifiers but was highly degraded for their NiO/Ga2O3counterparts. This may be a result of extended defect zones within the NiO. After irradiation, the switching characteristics were degraded and irradiated samples of both types could not survive switching above 0.7 A or 400 V, whereas reference samples were robust to 1 A and 1 kV. The carrier removal rate in both types of devices was ∼45 cm−1. The forward currents and on-state resistances were only slightly degraded by neutron irradiation.
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- Award ID(s):
- 1856662
- PAR ID:
- 10432297
- Publisher / Repository:
- The Electrochemical Society
- Date Published:
- Journal Name:
- ECS Journal of Solid State Science and Technology
- Volume:
- 12
- Issue:
- 7
- ISSN:
- 2162-8769
- Page Range / eLocation ID:
- Article No. 075004
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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