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Title: Mechanical integrated circuit materials
Award ID(s):
2054970
PAR ID:
10432652
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
Nature
Volume:
608
Issue:
7924
ISSN:
0028-0836
Page Range / eLocation ID:
699 to 703
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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