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Two-photon lithography (TPL) is a laser-based additive manufacturing technique that enables the printing of arbitrarily complex cm-scale polymeric 3D structures with sub-micron features. Although various approaches have been investigated to enable the printing of fine features in TPL, it is still challenging to achieve rapid sub-100 nm 3D printing. A key limitation is that the physical phenomena that govern the theoretical and practical limits of the minimum feature size are not well known. Here, we investigate these limits in the projection TPL (P-PTL) process, which is a high-throughput variant of TPL, wherein entire 2D layers are printed at once. We quantify the effects of the projected feature size, optical power, exposure time, and photoinitiator concentration on the printed feature size through finite element modeling of photopolymerization. Simulations are performed rapidly over a vast parameter set exceeding 10,000 combinations through a dynamic programming scheme, which is implemented on high-performance computing resources. We demonstrate that there is no physics-based limit to the minimum feature sizes achievable with a precise and well-calibrated P-TPL system, despite the discrete nature of illumination. However, the practically achievable minimum feature size is limited by the increased sensitivity of the degree of polymer conversion to the processing parameters in the sub-100 nm regime. The insights generated here can serve as a roadmap towards fast, precise, and predictable sub-100 nm 3D printing.
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Data for Printability Prediction in Projection Two-Photon Lithography via Machine Learning Based Surrogate Modeling of Photopolymerization
{"Abstract":["Data description \nThis dataset presents the raw and augmented data that were used to train the machine learning (ML) models for classification of printing outcome in projection two-photon lithography (P-TPL). P-TPL is an additive manufacturing technique for the fabrication of cm-scale complex 3D structures with features smaller than 200 nm. The P-TPL process is further described in this article: \u201cSaha, S. K., Wang, D., Nguyen, V. H., Chang, Y., Oakdale, J. S., and Chen, S.-C., 2019, "Scalable submicrometer additive manufacturing," Science, 366(6461), pp. 105-109.\u201d This specific dataset refers to the case wherein a set of five line features were projected and the printing outcome was classified into three classes: \u2018no printing\u2019, \u2018printing\u2019, \u2018overprinting\u2019. \n \nEach datapoint comprises a set of ten inputs (i.e., attributes) and one output (i.e., target) corresponding to these inputs. The inputs are: optical power (P), polymerization rate constant at the beginning of polymer conversion (kp-0), radical quenching rate constant (kq), termination rate constant at the beginning of polymer conversion (kt-0), number of optical pulses, (N), kp exponential function shape parameter (A), kt exponential function shape parameter (B), quantum yield of photoinitiator (QY), initial photoinitiator concentration (PIo), and the threshold degree of conversion (DOCth). The output variable is \u2018Class\u2019 which can take these three values: -1 for the class \u2018no printing\u2019, 0 for the class \u2018printing\u2019, and 1 for the class \u2018overprinting\u2019. \n\nThe raw data (i.e., the non-augmented data) refers to the data generated from finite element simulations of P-TPL. The augmented data was obtained from the raw data by (1) changing the DOCth and re-processing a solved finite element model or (2) by applying physics-based prior process knowledge. For example, it is known that if a given set of parameters failed to print, then decreasing the parameters that are positively correlated with printing (e.g. kp-0, power), while keeping the other parameters constant would also lead to no printing. Here, positive correlation means that individually increasing the input parameter will lead to an increase in the amount of printing. Similarly, increasing the parameters that are negatively correlated with printing (e.g. kq, kt-0), while keeping the other parameters constant would also lead to no printing. The converse is true for those datapoints that resulted in overprinting. \n\nThe 'Raw.csv' file contains the datapoints generated from finite element simulations, the 'Augmented.csv' file contains the datapoints generated via augmentation, and the 'Combined.csv' file contains the datapoints from both files. The ML models were trained on the combined dataset that included both raw and augmented data."]}
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- Award ID(s):
- 2045147
- PAR ID:
- 10435731
- Publisher / Repository:
- Mendeley
- Date Published:
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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