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Title: A Low-Energy Counting Electron Spectrometer Integrated into a Scanning Electron Microscope
Award ID(s):
2110535
PAR ID:
10439246
Author(s) / Creator(s):
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Date Published:
Journal Name:
2023 International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN)
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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