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Title: Controlling the Pd Metal Contact Polarity to Trigonal Tellurium by Atomic Hydrogen‐Removal of the Native Tellurium Oxide
Abstract

Palladium (Pd) electrodes have enabled superior performance in Te‐based devices. Theory predicts strong Fermi level (EF) pinning near the Te valence band, which likely explains the predominantp‐type conduction in Te transistors. The effects of the native TeOx on the contact polarity has not been explored. In this work, X‐ray and ultraviolet photoelectron spectra (XPS and UPS, respectively) reveal the native surface oxide de‐pins the EF between Pd and trigonal Te (t‐Te) and can reduce contact resistance of hole and electron contacts to Te for back end of line‐compatible complementary logic circuits. Atomic hydrogen reduces the native t‐Te oxide below the XPS detection limit, after which, the EF resides near the t‐Te conduction band edge. Therefore, ann‐type band alignment is formed between Pd and t‐Te via an atomic hydrogen treatment. Furthermore, UPS shows the EF is pinned near the t‐Te conduction band edge. XPS indicates the formation of a PdTex intermetallic at the Pdt‐Te interface also affects the electrostatics of the interface. The concentration of PdTex is 40% higher when TeOxis removed from the t‐Te surface before Pd metallization, likely the root cause of the low (pinned) work function when the native oxide is absent.

 
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NSF-PAR ID:
10452178
Author(s) / Creator(s):
 ;  ;  ;  ;  
Publisher / Repository:
Wiley Blackwell (John Wiley & Sons)
Date Published:
Journal Name:
Advanced Materials Interfaces
Volume:
8
Issue:
7
ISSN:
2196-7350
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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    References

    Lee, D. H.; Park, H.; Clevenger, M.; Kim, H.; Kim, C. S.; Liu, M.; Kim, G.; Song, H. W.; No, K.; Kim, S. Y.; Ko, D.-K.; Lucietto, A.; Park, H.; Lee, S., High-Performance Oxide-Based p–n Heterojunctions Integrating p-SnOx and n-InGaZnO.ACS Applied Materials & Interfaces2021,13(46), 55676-55686.

    Hautier, G.; Miglio, A.; Ceder, G.; Rignanese, G.-M.; Gonze, X., Identification and design principles of low hole effective mass p-type transparent conducting oxides.Nat Commun2013,4.

    Yim, K.; Youn, Y.; Lee, M.; Yoo, D.; Lee, J.; Cho, S. H.; Han, S., Computational discovery of p-type transparent oxide semiconductors using hydrogen descriptor.npj Computational Materials2018,4(1), 17.

    Figure 1

     

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