Modeling, fabrication, and readout of compact optomechanical accelerometers
- Award ID(s):
- 2207794
- PAR ID:
- 10476434
- Editor(s):
- Piyawattanametha, Wibool; Park, Yong-Hwa; Zappe, Hans
- Publisher / Repository:
- SPIE
- Date Published:
- Journal Name:
- Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII
- ISBN:
- 9781510659735
- Page Range / eLocation ID:
- 3
- Format(s):
- Medium: X
- Location:
- San Francisco, United States
- Sponsoring Org:
- National Science Foundation
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