Hybrid physics-guided data-driven modeling for generalizable geometric accuracy prediction and improvement in two-photon lithography
- PAR ID:
- 10484976
- Publisher / Repository:
- Elsevier
- Date Published:
- Journal Name:
- Journal of Manufacturing Processes
- Volume:
- 110
- Issue:
- C
- ISSN:
- 1526-6125
- Page Range / eLocation ID:
- 202 to 210
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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