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Title: Coherent X-ray Spectroscopy Elucidates Nanoscale Dynamics of Plasma-Enhanced Thin-Film Growth
NSF-PAR ID:
10485101
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Chemical Society
Date Published:
Journal Name:
ACS Nano
Volume:
18
Issue:
3
ISSN:
1936-0851
Format(s):
Medium: X Size: p. 1982-1994
Size(s):
["p. 1982-1994"]
Sponsoring Org:
National Science Foundation
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