Local Environment of Sc and Y Dopant Ions in Aluminum Nitride Thin Films
- Award ID(s):
- 2312690
- PAR ID:
- 10486706
- Publisher / Repository:
- American Chemical Society
- Date Published:
- Journal Name:
- ACS Applied Electronic Materials
- Volume:
- 6
- Issue:
- 2
- ISSN:
- 2637-6113
- Format(s):
- Medium: X Size: p. 853-861
- Size(s):
- p. 853-861
- Sponsoring Org:
- National Science Foundation
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