Photoresist planarized trench isolation for monolithic GaN µLED displays
- Award ID(s):
- 1751675
- PAR ID:
- 10493797
- Publisher / Repository:
- SPIE
- Date Published:
- ISBN:
- 9781510659476
- Page Range / eLocation ID:
- 68
- Format(s):
- Medium: X
- Location:
- San Francisco, United States
- Sponsoring Org:
- National Science Foundation
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