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Title: Determination of film thicknesses of metal oxides prepared by atomic layer deposition on SBA-15
Award ID(s):
2309043 1904767
PAR ID:
10500941
Author(s) / Creator(s):
; ; ; ; ;
Publisher / Repository:
Elsevier ltd
Date Published:
Journal Name:
Microporous and Mesoporous Materials
Volume:
366
Issue:
C
ISSN:
1387-1811
Page Range / eLocation ID:
112945
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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