Tharpe, Troy, Hershkovitz, Eitan, Hakim, Faysal, Kim, Honggyu, and Tabrizian, Roozbeh. Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices. Retrieved from https://par.nsf.gov/biblio/10502939. Nature Electronics 6.8 Web. doi:10.1038/s41928-023-00999-9.

Tharpe, Troy, Hershkovitz, Eitan, Hakim, Faysal, Kim, Honggyu, & Tabrizian, Roozbeh. Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices. Nature Electronics, 6 (8). Retrieved from https://par.nsf.gov/biblio/10502939. https://doi.org/10.1038/s41928-023-00999-9

Tharpe, Troy, Hershkovitz, Eitan, Hakim, Faysal, Kim, Honggyu, and Tabrizian, Roozbeh. "Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices". Nature Electronics 6 (8). Country unknown/Code not available: Springer Nature. https://doi.org/10.1038/s41928-023-00999-9. https://par.nsf.gov/biblio/10502939.

@article{osti_10502939,
place = {Country unknown/Code not available}, title = {Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices}, url = {https://par.nsf.gov/biblio/10502939}, DOI = {10.1038/s41928-023-00999-9}, abstractNote = {}, journal = {Nature Electronics}, volume = {6}, number = {8}, publisher = {Springer Nature}, author = {Tharpe, Troy and Hershkovitz, Eitan and Hakim, Faysal and Kim, Honggyu and Tabrizian, Roozbeh}, }