Precise alignment of the electron beam is critical for successful application of scanning transmission electron microscopes (STEM) to understanding materials at atomic level. Despite the success of aberration correctors, aberration correction is still a complex process. Here we approach aberration correction from the perspective of accelerator physics and show it is equivalent to minimizing the emittance growth of the beam, the span of the phase space distribution of the probe. We train a deep learning model to predict emittance growth from experimentally accessible Ronchigrams. Both simulation and experimental results show the model can capture the emittance variation with aberration coefficients accurately. We further demonstrate the model can act as a fast-executing function for the global optimization of the lens parameters. Our approach enables new ways to quickly quantify and automate aberration correction that takes advantage of the rapid measurements possible with high-speed electron cameras. In part II of the paper, we demonstrate how the emittance metric enables rapid online tuning of the aberration corrector using Bayesian optimization.
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Intrinsic aberration coefficients for plane-symmetric optical systems consisting of spherical surfaces
This paper presents the analytical form of the intrinsic aberration coefficients for spherical plane-symmetric optical systems expressed as a function of first-order system parameters and the paraxial chief and marginal ray angles and heights. The derived aberration coefficients are in the third and fourth groups with the multiplication of two or three vector products of pupil and field vectors.
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- PAR ID:
- 10503283
- Publisher / Repository:
- Journal of the Optical Society of America A
- Date Published:
- Journal Name:
- Journal of the Optical Society of America A
- Volume:
- 40
- Issue:
- 2
- ISSN:
- 1084-7529
- Page Range / eLocation ID:
- 378
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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