Terekhov, Pavel D., Chang, Shengyuan, Rahman, Md Tarek, Shafi, Sadman, and Ni, Xingjie. Metasurface layout correction algorithm for intra-atom fabrication compatibility. Web. doi:10.1117/12.2677779.

Terekhov, Pavel D., Chang, Shengyuan, Rahman, Md Tarek, Shafi, Sadman, & Ni, Xingjie. Metasurface layout correction algorithm for intra-atom fabrication compatibility. https://doi.org/10.1117/12.2677779

Terekhov, Pavel D., Chang, Shengyuan, Rahman, Md Tarek, Shafi, Sadman, and Ni, Xingjie. "Metasurface layout correction algorithm for intra-atom fabrication compatibility". Country unknown/Code not available: SPIE. https://doi.org/10.1117/12.2677779. https://par.nsf.gov/biblio/10504590.

@article{osti_10504590,
place = {Country unknown/Code not available}, title = {Metasurface layout correction algorithm for intra-atom fabrication compatibility}, url = {https://par.nsf.gov/biblio/10504590}, DOI = {10.1117/12.2677779}, abstractNote = {}, journal = {}, publisher = {SPIE}, author = {Terekhov, Pavel D. and Chang, Shengyuan and Rahman, Md Tarek and Shafi, Sadman and Ni, Xingjie}, editor = {Park, Wounjhang and Attias, André-Jean and Panchapakesan, Balaji} }