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Title: Comparative study of MBE- and ALD-deposited doped zinc oxide
Award ID(s):
1808928
PAR ID:
10507321
Author(s) / Creator(s):
; ; ; ;
Editor(s):
Teherani, Ferechteh H.; Look, David C.; Rogers, David J.
Publisher / Repository:
SPIE
Date Published:
ISBN:
9781510642096
Page Range / eLocation ID:
31
Format(s):
Medium: X
Location:
Online Only, United States
Sponsoring Org:
National Science Foundation
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