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Title: Determination of PMMA etch rates using VASE modeling
Award ID(s):
2120581
PAR ID:
10529552
Author(s) / Creator(s):
; ; ;
Editor(s):
Osiński, Marek; Arakawa, Yasuhiko; Witzigmann, Bernd
Publisher / Repository:
SPIE
Date Published:
ISBN:
9781510670204
Page Range / eLocation ID:
50
Format(s):
Medium: X
Location:
San Francisco, United States
Sponsoring Org:
National Science Foundation
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