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Title: Manipulating the electrical properties of conductive substoichiometric titanium oxides
Conducting metal oxides offer many advantages for novel electronics applications, including sensors, fuel cells, piezoelectric devices, and microelectronic circuits, due to their conductivity, hardness, and chemically inert surfaces. In particular, their high electrical conductivity and mechanical properties make these materials suitable for microelectromechanical and nanoelectromechanical system (MEMS/NEMS) devices. NEMS switches have great potential for next-generation electronic computing associated with scalability to small dimensions, low power consumption, and (relatively) high speed. Oxygen-deficient Ti oxides with ordered planes of vacancies (TinO2n−1, Magn´eli phases) are good candidates for NEMS applications because of their metallic conductivity, environmental resistance, and low cost, as compared with other conductive oxides like RuO2. Although Ti sub-oxides have been produced in crystalline form, various synthesis methods may also produce amorphous material. In this work, we focus on the structural and electrical transport properties of several Ti sub-oxides. In particular, we examine the effects of temperature, transition-metal dopants, and amorphization on these structural and electronic properties and the potential applicability of Magn´eli phase Ti sub-oxides for NEMS switch applications.  more » « less
Award ID(s):
1854702
PAR ID:
10532304
Author(s) / Creator(s):
; ; ;
Publisher / Repository:
American Physical Society
Date Published:
Journal Name:
Physical Review B
Volume:
109
Issue:
6
ISSN:
2469-9950
Subject(s) / Keyword(s):
DFT materials modeling titanium suboxides conductive oxides NEMS MEMS
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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