Abstract Dimensional change in a solid due to electrochemically driven compositional change is termed electro‐chemo‐mechanical (ECM) coupling. This effect causes mechanical instability in Li‐ion batteries and solid oxide fuel cells. Nevertheless, it can generate considerable force and deformation, making it attractive for mechanical actuation. Here a Si‐compatible ECM actuator in the form of a 2 mm diameter membrane is demonstrated. Actuation results from oxygen ion transfer between two 0.1 µm thick Ti oxide\Ce0.8Gd0.2O1.9nanocomposite layers separated by a 1.5 µm thick Ce0.8Gd0.2O1.9solid electrolyte. The chemical reaction responsible for stress generation is electrochemical oxidation/reduction in the composites. Under ambient conditions, application of 5 V DC produces actuator response within seconds, generating vertical displacement of several µm with calculated stress≈3.5 MPa. The membrane actuator preserves its final mechanical state for more than 1 h following voltage removal. These characteristics uniquely suit ECM actuators for room temperature applications in Si‐integrated microelectromechanical systems.
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Phase segregation and miscibility of TiO x nanocomposites in Gd-doped ceria solid electrolyte material
Electro-chemo-mechanical (ECM) coupling refers to mechanical deformation due to electrochemically driven compositional change in a solid. An ECM actuator producing micrometre-size displacements and long-term stability at room temperature was recently reported, comprising a 20 mol% Gd-doped ceria (20GDC), a solid electrolyte membrane, placed between two working bodies made of TiOx/20GDC (Ti-GDC) nanocomposites with Ti concentration of 38 mol%. The volumetric changes originating from oxidation or reduction in the local TiOxunits are hypothesized to be the origin of mechanical deformation in the ECM actuator. Studying the Ti concentration-dependent structural changes in the Ti-GDC nanocomposites is therefore required for (i) understanding the mechanism of dimensional changes in the ECM actuator and (ii) maximizing the ECM response. Here, the systematic investigation of the local structure of the Ti and Ce ions in Ti-GDC over a broad range of Ti concentrations using synchrotron X-ray absorption spectroscopy and X-ray diffraction is reported. The main finding is that, depending on the Ti concentration, Ti atoms either form a cerium titanate or segregate into a TiO2anatase-like phase. The transition region between these two regimes with Ti(IV) concentration between 19% and 57% contained strongly disordered TiOxunits dispersed in 20GDC containing Ce(III) and Ce(IV) and hence rich with oxygen vacancies. As a result, this transition region is proposed to be the most advantageous for developing ECM-active materials.
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- Award ID(s):
- 1911592
- PAR ID:
- 10538267
- Publisher / Repository:
- IUCr
- Date Published:
- Journal Name:
- Journal of Synchrotron Radiation
- Volume:
- 30
- Issue:
- 4
- ISSN:
- 1600-5775
- Page Range / eLocation ID:
- 758 to 765
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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