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Title: High-speed in-line optical angular scatterometer for high-throughput roll-to-roll nanofabrication
Roll-to-roll and other high-speed printing manufacturing processes are increasingly being extended to micro- and nanoelectronics and photonics due to cost and throughput advantages as compared with traditional wafer-scale manufacturing. The extra degrees of freedom associated with a moving web require high speed, in-line metrology to control the manufacturing process. Many state-of-the-art metrology approaches have sub-10 nm resolution but cannot be implemented during real-time fabrication processes because of environmental constraints or contact/cross sectional requirements. Optical angular scatterometry is a non-contact metrology approach that can be implemented at high speed. We demonstrate a system that uses 45° off-axis parabolic mirrors and an 8kHz resonant scanner to vary the incident/reflected angle from ~17° to ~67°, suitable for nanoscale metrology at web speeds of up to 350 cm/s, well-beyond the speed of current manufacturing tools. Scatterometry is sensitive not only to gross defects (missing pattern sections) but also to variations in nanoscale pattern details, offering a pathway to feedback control of the manufacturing process.  more » « less
Award ID(s):
2041676
PAR ID:
10545608
Author(s) / Creator(s):
; ; ; ; ;
Editor(s):
Panning, Eric M; Liddle, J Alexander
Publisher / Repository:
SPIE
Date Published:
Journal Name:
Proceedings of SPIE the International Society for Optical Engineering
ISSN:
0277-786X
ISBN:
9781510640535
Page Range / eLocation ID:
44
Subject(s) / Keyword(s):
Roll-to-roll Metrology Optical Scatterometry
Format(s):
Medium: X
Location:
Online Only, United States
Sponsoring Org:
National Science Foundation
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