PMUT Package Design Optimization via Machine Learning

Teng, M; Yue, W; Peng, Y; Tsao, P; Deng, H; Xia, F; Lin, L

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Citation Details

PMUT Package Design Optimization via Machine Learning

Award ID(s):: 2128311

PAR ID:: 10548689

Author(s) / Creator(s):: Teng, M; Yue, W; Peng, Y; Tsao, P; Deng, H; Xia, F; Lin, L

Publisher / Repository:: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Date Published:: 2024-01-22

ISSN:: 2160-1968

ISBN:: 979-8-3503-5792-9

Page Range / eLocation ID:: 971-974

Format(s):: Medium: X

Sponsoring Org:: National Science Foundation

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