Atomic layer processing of MoS2

Hues, John D; Tenorio, Jacob A; Leong, Icelene; Hues, Steven M; Graugnard, Elton

doi:10.1117/12.3028874

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Citation Details

Atomic layer processing of MoS2

Award ID(s):: 2113873

PAR ID:: 10557206

Author(s) / Creator(s):: Hues, John D; Tenorio, Jacob A; Leong, Icelene; Hues, Steven M; Graugnard, Elton

Editor(s):: Kobayashi, Nobuhiko P; Talin, A Alec; Davydov, Albert V; Islam, M Saif

Publisher / Repository:: SPIE

Date Published:: 2024-10-02

ISBN:: 9781510678880

Page Range / eLocation ID:: 24

Format(s):: Medium: X

Location:: San Diego, United States

Sponsoring Org:: National Science Foundation

Free Publicly Accessible Full Text
Accepted Manuscript1.0
Conference Paper:
https://doi.org/10.1117/12.3028874

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