Zhou, Fengfeng, Chen, Siying, Akin, Semih, Gabor, Theodore, and Jun, Martin BG. Real-time monitoring of thin film thickness and surface roughness using a single mode optical fiber. Retrieved from https://par.nsf.gov/biblio/10567905. Mechanical Systems and Signal Processing 224.C Web. doi:10.1016/j.ymssp.2024.112219.

Zhou, Fengfeng, Chen, Siying, Akin, Semih, Gabor, Theodore, & Jun, Martin BG. Real-time monitoring of thin film thickness and surface roughness using a single mode optical fiber. Mechanical Systems and Signal Processing, 224 (C). Retrieved from https://par.nsf.gov/biblio/10567905. https://doi.org/10.1016/j.ymssp.2024.112219

Zhou, Fengfeng, Chen, Siying, Akin, Semih, Gabor, Theodore, and Jun, Martin BG. "Real-time monitoring of thin film thickness and surface roughness using a single mode optical fiber". Mechanical Systems and Signal Processing 224 (C). Country unknown/Code not available: ScienceDirect. https://doi.org/10.1016/j.ymssp.2024.112219. https://par.nsf.gov/biblio/10567905.

@article{osti_10567905,
place = {Country unknown/Code not available}, title = {Real-time monitoring of thin film thickness and surface roughness using a single mode optical fiber}, url = {https://par.nsf.gov/biblio/10567905}, DOI = {10.1016/j.ymssp.2024.112219}, abstractNote = {}, journal = {Mechanical Systems and Signal Processing}, volume = {224}, number = {C}, publisher = {ScienceDirect}, author = {Zhou, Fengfeng and Chen, Siying and Akin, Semih and Gabor, Theodore and Jun, Martin BG}, }