Polymer-like hydrogenated amorphous carbon thin films fabricated by plasma-enhanced chemical vapor deposition of cyclohexane precursor
- Award ID(s):
- 2026801
- PAR ID:
- 10583062
- Publisher / Repository:
- Material Chemistry and Physics
- Date Published:
- Journal Name:
- Materials Chemistry and Physics
- Volume:
- 326
- Issue:
- C
- ISSN:
- 0254-0584
- Page Range / eLocation ID:
- 129787
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
More Like this
No document suggestions found
An official website of the United States government

