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Title: Effect of Precursor Purge Time on Plasma-Enhanced Atomic Layer Deposition-Prepared Ferroelectric Hf 0.5 Zr 0.5 O 2 Phase and Performance
Award ID(s):
2149487 2132918
PAR ID:
10590477
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ;
Publisher / Repository:
American Chemical Society
Date Published:
Journal Name:
ACS Omega
Volume:
10
Issue:
20
ISSN:
2470-1343
Format(s):
Medium: X Size: p. 20524-20535
Size(s):
p. 20524-20535
Sponsoring Org:
National Science Foundation
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