Du, Xingyu, Sharma, Nishant, Tang, Zichen, Leblanc, Chloe, Jariwala, Deep, and Olsson, Roy H. Near 6-GHz Sezawa Mode Surface Acoustic Wave Resonators Using AlScN on SiC. Retrieved from https://par.nsf.gov/biblio/10591255. Journal of Microelectromechanical Systems 33.5 Web. doi:10.1109/JMEMS.2024.3430984.

Du, Xingyu, Sharma, Nishant, Tang, Zichen, Leblanc, Chloe, Jariwala, Deep, & Olsson, Roy H. Near 6-GHz Sezawa Mode Surface Acoustic Wave Resonators Using AlScN on SiC. Journal of Microelectromechanical Systems, 33 (5). Retrieved from https://par.nsf.gov/biblio/10591255. https://doi.org/10.1109/JMEMS.2024.3430984

Du, Xingyu, Sharma, Nishant, Tang, Zichen, Leblanc, Chloe, Jariwala, Deep, and Olsson, Roy H. "Near 6-GHz Sezawa Mode Surface Acoustic Wave Resonators Using AlScN on SiC". Journal of Microelectromechanical Systems 33 (5). Country unknown/Code not available: IEEE. https://doi.org/10.1109/JMEMS.2024.3430984. https://par.nsf.gov/biblio/10591255.

@article{osti_10591255,
place = {Country unknown/Code not available}, title = {Near 6-GHz Sezawa Mode Surface Acoustic Wave Resonators Using AlScN on SiC}, url = {https://par.nsf.gov/biblio/10591255}, DOI = {10.1109/JMEMS.2024.3430984}, abstractNote = {}, journal = {Journal of Microelectromechanical Systems}, volume = {33}, number = {5}, publisher = {IEEE}, author = {Du, Xingyu and Sharma, Nishant and Tang, Zichen and Leblanc, Chloe and Jariwala, Deep and Olsson, Roy H}, }