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Abstract Dielectric metasurfaces, composed of planar arrays of subwavelength dielectric structures that collectively mimic the operation of conventional bulk optical elements, have revolutionized the field of optics by their potential in constructing high-efficiency and multi-functional optoelectronic systems on chip. The performance of a dielectric metasurface is largely determined by its constituent material, which is highly desired to have a high refractive index, low optical loss and wide bandgap, and at the same time, be fabrication friendly. Here, we present a new material platform based on tantalum pentoxide (Ta2O5) for implementing high-performance dielectric metasurface optics over the ultraviolet and visible spectral region. This wide-bandgap dielectric, exhibiting a high refractive index exceeding 2.1 and negligible extinction coefficient across a broad spectrum, can be easily deposited over large areas with good quality using straightforward physical vapor deposition, and patterned into high-aspect-ratio subwavelength nanostructures through commonly-available fluorine-gas-based reactive ion etching. We implement a series of high-efficiency ultraviolet and visible metasurfaces with representative light-field modulation functionalities including polarization-independent high-numerical-aperture lensing, spin-selective hologram projection, and vivid structural color generation, and the devices exhibit operational efficiencies up to 80%. Our work overcomes limitations faced by scalability of commonly-employed metasurface dielectrics and their operation into the visible and ultraviolet spectral range, and provides a novel route towards realization of high-performance, robust and foundry-manufacturable metasurface optics.
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Full color visible imaging with crystalline silicon meta-optics
Abstract Silicon is a common material of choice for semiconductor optics in the infrared spectral range, due to its low cost, well-developed high-volume manufacturing methods, high refractive index, and transparency. It is, however, typically ill-suited for applications in the visible range, due to its large absorption coefficient, especially for green and blue light. Counterintuitively, we demonstrate how ultra-thin crystalline meta-optics enable full-color imaging in the visible range. For this purpose, we employ an inverse design approach, which maximizes the volume under the broadband modulation transfer function of the meta-optics. Beyond that, we demonstrate polarization-multiplexed functionality in the visible. This is particularly important as polarization optics require high index materials, a characteristic often difficult to obtain in the visible.
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- PAR ID:
- 10606641
- Publisher / Repository:
- Nature Publishing Group
- Date Published:
- Journal Name:
- Light: Science & Applications
- Volume:
- 14
- Issue:
- 1
- ISSN:
- 2047-7538
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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