Study of Frequency Trimming Ability and Performance Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonators by Joule Heating via Localized Annealing
- Award ID(s):
- 2329207
- PAR ID:
- 10635808
- Publisher / Repository:
- IEEE
- Date Published:
- Journal Name:
- IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- Volume:
- 72
- Issue:
- 5
- ISSN:
- 0885-3010
- Page Range / eLocation ID:
- 686 to 696
- Subject(s) / Keyword(s):
- Finite element method (FEM), frequency trimming, Joule heating, localized annealing, micro-electromechanical systems (MEMS), MEMS resonator, piezoelectric, Q-factor, thin-film piezoelectric-on-silicon (TPoS).
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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