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Title: Study of Frequency Trimming Ability and Performance Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonators by Joule Heating via Localized Annealing
Award ID(s):
2329207
PAR ID:
10635808
Author(s) / Creator(s):
; ; ; ;
Publisher / Repository:
IEEE
Date Published:
Journal Name:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume:
72
Issue:
5
ISSN:
0885-3010
Page Range / eLocation ID:
686 to 696
Subject(s) / Keyword(s):
Finite element method (FEM), frequency trimming, Joule heating, localized annealing, micro-electromechanical systems (MEMS), MEMS resonator, piezoelectric, Q-factor, thin-film piezoelectric-on-silicon (TPoS).
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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