Sheats, Jayna, Robinson, Matthew, Steinschreiber, Natalia, Fromel, Michele, Bachman, Benjamin, Hendricks, Nicholas, and Stark, Julia. Patterning processes with thermally decomposable polymers. Retrieved from https://par.nsf.gov/biblio/10664653. Web. doi:10.1117/12.3012601.

Sheats, Jayna, Robinson, Matthew, Steinschreiber, Natalia, Fromel, Michele, Bachman, Benjamin, Hendricks, Nicholas, & Stark, Julia. Patterning processes with thermally decomposable polymers. Retrieved from https://par.nsf.gov/biblio/10664653. https://doi.org/10.1117/12.3012601

Sheats, Jayna, Robinson, Matthew, Steinschreiber, Natalia, Fromel, Michele, Bachman, Benjamin, Hendricks, Nicholas, and Stark, Julia. "Patterning processes with thermally decomposable polymers". Country unknown/Code not available: SPIE. https://doi.org/10.1117/12.3012601. https://par.nsf.gov/biblio/10664653.

@article{osti_10664653,
place = {Country unknown/Code not available}, title = {Patterning processes with thermally decomposable polymers}, url = {https://par.nsf.gov/biblio/10664653}, DOI = {10.1117/12.3012601}, abstractNote = {Not Available}, journal = {}, publisher = {SPIE}, author = {Sheats, Jayna and Robinson, Matthew and Steinschreiber, Natalia and Fromel, Michele and Bachman, Benjamin and Hendricks, Nicholas and Stark, Julia}, editor = {Liddle, J Alexander and Ruiz, Ricardo} }