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Title: 2D Indium Oxide at the Epitaxial Graphene/SIC Interface: Synthesis, Structure, Properties, and Devices
Abstract Scaled and high‐quality insulators are crucial for fabricating 2D/3D hybrid vertical electronic devices such as metal‐oxide‐semiconductor (MOS) based Schottky diodes and hot electron transistors, the production of which is constrained by the scarcity of bulk layered wide bandgap semiconductors. In this research, the synthesis of a new 2D insulator, monolayer InO2, which differs in stoichiometry from its bulk form is presented, over a large area (>300 µm2) by intercalating at the epitaxial graphene (EG)/SiC interface. By adjusting the lateral size of graphene through optical lithography prior to the intercalation, the thickness of InO2is tuned such that it is 85% monolayer. The preference for monolayer formation of InO2is explained using molecular dynamics and density functional theory (DFT) calculations. Additionally, the bandgap of InO2is calculated to be 4.1 eV, differing from its bulk form (2.7 eV). Furthermore, MOS‐based Schottky diode measurements on InO2intercalated EG/n‐SiC demonstrate that the EG/n‐SiC junction transforms from ohmic to a Schottky junction upon intercalation, with a barrier height of 0.87 eV and a rectification ratio of ≈105. These findings introduce a new addition to the 2D insulator family, demonstrating the utility of monolayer InO2as a barrier in vertical electronic devices.  more » « less
Award ID(s):
1539916
PAR ID:
10681085
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  
Publisher / Repository:
Wiley-VCH GmbH
Date Published:
Journal Name:
Advanced Materials
Volume:
38
Issue:
6
ISSN:
0935-9648
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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