The silicon nitride/silicon (Si3N4/Si) photonic platform has attracted significant interest due to its ultra-low-loss waveguides and high-performance optical components. Progress in heterogeneous integration has enabled the development of active photonic devices on Si3N4, including PIN waveguide photodiodes. However, to the best of our knowledge, an integrated avalanche photodiode (APD) with internal gain operating at 1550 nm wavelength has not been demonstrated to date. Here, we report on the design, fabrication, and characterization of InP/InGaAs separate absorption, charge, and multiplication (SACM) APDs heterogeneously integrated on Si3N4waveguides. Our APDs have a dark current of 5 nA near breakdown at room temperature, a multiplication gain of 166, and an internal responsivity of 0.61 A/W at unity gain. The 3-dB bandwidth is 4.2 GHz, and we demonstrate open eye diagrams at 7.5 Gbps.
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Ternary-containing Al 0.7 InAsSb digital alloys on InP and InP-on-Si [Invited]
AlxIn1−xAsySb1−yis a promising multiplier for avalanche photodiodes (APD) on InP for near-infrared applications. In this work, we investigated the potential of two different ternary-containing layer stacks for the growth of AlInAsSb digital alloys on InP and InP-on-Si templates with applications in future photodetectors. STEM measurements confirmed high-quality material and interfaces on both substrates with no evidence of phase separation. Low dark currents and high gains were measured from PIN diodes grown on both substrates, with slightly higher dark currents observed in the Si-based device due to defects resulting from lattice mismatch in the template.
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- Award ID(s):
- 2430629
- PAR ID:
- 10712015
- Publisher / Repository:
- Opt. Mater. Exp.
- Date Published:
- Journal Name:
- Optical Materials Express
- Volume:
- 15
- Issue:
- 10
- ISSN:
- 2159-3930
- Page Range / eLocation ID:
- 2568
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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