%ACho, Y.%ACho, Y%AKumar, A%AKumar, A.%AXu, S.%AXu, S%AZou, J.%AZou, J%BJournal Name: Journal of Micromechanics and Microengineering; Journal Volume: 26; Journal Issue: 10; Related Information: CHORUS Timestamp: 2020-04-11 03:53:21 %D2016%IIOP Publishing %JJournal Name: Journal of Micromechanics and Microengineering; Journal Volume: 26; Journal Issue: 10; Related Information: CHORUS Timestamp: 2020-04-11 03:53:21 %K %MOSTI ID: 10018841 %PMedium: X %TMicromachined silicon acoustic delay line with 3D-printed micro linkers and tapered input for improved structural stability and acoustic directivity %XNot Available %0Journal Article