%AOngaro, Federico%AJin, Qianru%ASiciliani de Cumis, Ugo%AGhosh, Arijit%ADenasi, Alper%AGracias, David%AMisra, Sarthak%BJournal Name: AIP Advances; Journal Volume: 9; Journal Issue: 5 %D2019%I %JJournal Name: AIP Advances; Journal Volume: 9; Journal Issue: 5 %K %MOSTI ID: 10094621 %PMedium: X %TForce characterization and analysis of thin film actuators for untethered microdevices %X %0Journal Article