%AAhmed, Syeed%AAhmed, Syeed [Materials Science and Engineering Program, Washington State University, Pullman, Washington 99164-2814, Department of Physics and Astronomy, Washington State University, Pullman, Washington 99164-2814]%AHuso, Jesse%AHuso, Jesse [Department of Physics and Astronomy, Washington State University, Pullman, Washington 99164-2814]%ARitter, Jacob%ARitter, Jacob [Department of Physics and Astronomy, Washington State University, Pullman, Washington 99164-2814]%AIgo, John%AIgo, John [Department of Physics and Astronomy, Washington State University, Pullman, Washington 99164-2814]%AGu, Yi%AGu, Yi [Materials Science and Engineering Program, Washington State University, Pullman, Washington 99164-2814, Department of Physics and Astronomy, Washington State University, Pullman, Washington 99164-2814]%AMcCluskey, Matthew%AMcCluskey, Matthew [Materials Science and Engineering Program, Washington State University, Pullman, Washington 99164-2814, Department of Physics and Astronomy, Washington State University, Pullman, Washington 99164-2814]%BJournal Name: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena; Journal Volume: 38; Journal Issue: 3; Related Information: CHORUS Timestamp: 2023-07-16 03:39:05 %D2020%IAmerican Vacuum Society %JJournal Name: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena; Journal Volume: 38; Journal Issue: 3; Related Information: CHORUS Timestamp: 2023-07-16 03:39:05 %K %MOSTI ID: 10142320 %PMedium: X %TInsulating regions in a TiO2 thin film defined by laser irradiation %X

Titanium dioxide (TiO2) has a range of applications including catalysis, hydrogen production, and water purification. In this work, anatase TiO2 was annealed in vacuum at 800 °C, resulting in a conductive thin film. Exposure to subgap laser light (532 nm wavelength) caused a seven order-of-magnitude increase in resistance. Laser-irradiated regions showed an increase in optical transmission, consistent with a reduction in oxygen vacancy concentration. Scanning electron microscopy and Raman spectroscopy indicate that laser irradiation did not change the morphology, composition, or phase of the material.

%0Journal Article